Characteristics

Modern simulation processes play an important role in the development of microwave systems. They are necessary for unit design, process optimisation and for generating new application fields for this technology. The group for microwaves and plasmas relies primarily on simulation with finite-element method (FEM) software.

For microwave applicators the electromagnetic field distribution and the heating of materials placed in the unit can be numerically and self-consistently investigated - the behaviour of the system can therefore be reliably modelled. Advanced numeric methods, together with high memory and processing capacities mean that volumes of several cubic meters can be measured. The thermodynamic data obtained in this way, such as temperature profile and heat flow, mean that a cost-efficient appraisal of the functionality of microwave applicators and processes can be obtained before construction of the unit and initial experiments.

The second large range of simulation services we offer includes the modelling of microwave plasmas in applicators and sources. Experimentally tested parametric models are available, which enable simulation of temporal developments in the electron density distribution in complex geometries. A model has also been developed which, on the basis of the geometry, gas pressure and microwave output, can self-consistently describe the development of plasma temperature, electromagnetic field distribution, plasma density and various reactive species (e.g. in the metastable states) for single-atom gases such as argon. This enables simple evaluation of existing plasma processes and prediction of the properties of new developments.

Our service / facilities and equipment

Microwave simulation

• Finite element simulation of electromagnetic fields in 2D and 3D

• Reliable simulation of the heating behaviour of materials in microwave applicators

• Design of applicator geometries and processes

• Optimisation of the introduction of electromagnetic energy into the material

• Automated work-off of large parameter ranges

Simulation of microwave plasmas

• Parametric simulation of electron density of plasmas in 2D and 3D

• Coupled simulation models for plasma temperature, electron density, electromagnetic field, various species (e.g. metastable states in argon) etc.

• Design and development of plasma sources and MW-plasma applicators

Process monitoring

• Measurement of dielectric data

• Thermographic imaging of temperature distribution

Facilities and equipment

• "COMSOL Multiphysics" FEM simulation software with modules for electromagnetism, heat transfer, CAD data import and COMSOL Script

• Powerful 64 bit simulation computer (4 x 3 GHz Intel Xeon cores with 32 GB RAM, AMD Athlon 3500+ with 4 GB RAM) for calculation of models with several million degrees of freedom

• Library for examples of microwave application, material data and verified simulation models